ASTM F1394-1992(2005) 测定从气体分配系统阀门产生的粒子成分的标准试验方法
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【英文标准名称】:StandardTestMethodforDeterminationofParticleContributionfromGasDistributionSystemValves
【原文标准名称】:测定从气体分配系统阀门产生的粒子成分的标准试验方法
【标准号】:ASTMF1394-1992(2005)
【标准状态】:现行
【国别】:
【发布日期】:1992
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.10
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:试验;阀门;分配系统;气体分配
【英文主题词】:Condensationnucleuscounter(CNC);Electricalconductors-semiconductors;Flowandflowrate-semiconductorapplications;Gasdistributionsystems;Laserparticlecounter(LPC);Lasersandlaserapplications;Mechanicalstress;Minimumdetectionlim
【摘要】:Thepurposeofthistestmethodistodefineaprocedurefortestingcomponentsintendedforinstallationintoahigh-puritygasdistributionsystem.Applicationofthistestmethodisexpectedtoyieldcomparabledataamongcomponentstestedforthepurposesofqualificationforthisinstallation.BackgroundTesting8212;Thistestmethodusesbackgroundtestingtoensurethatthesystemisnotcontributingparticlesabovealow,acceptablelevel.Thisensuresthatcountsseenarefromthetestdevice,notfromacontaminatedsystem.Thetechniquesusedtoobtainbackgroundcountsdonotproduceconditionsidenticaltotheconditionsexistingwhenatestdeviceisinplace.Itisrecommendedthatthecontrolproductsberunperiodicallytoseethattheygiveconsistentresults.Thesecontrolproductsshouldbethelowestparticlereleaseproducts.Theywillbeadditionalproofthatthesystemisnotcontributingexcessparticlesduringthestatic,dynamic,orimpactportionsofthetest.Thistestmethodcanbeusedfortestinglengthsoftubing.Theflowcriteriawillbeidenticaltothatindicatedforvalves.Atubingtestwouldonlyincludethestaticbackground,theimpactbackground,andthestaticandimpactportionsofthemethod.Adynamicportioncouldbeaddedbyactuatingtheupstreampneumaticvalve(PV1),thuscreatingaflowsurgetothetestlengthoftubing.1.1Thistestmethodcoversgasdistributionsystemcomponentsintendedforinstallationintoahigh-puritygasdistributionsystem.1.1.2Thistestmethoddescribesaproceduredesignedtodrawstatisticallysignificantcomparisonsofparticulategenerationperformanceofvalvestestedunderaggressiveconditions.1.1.3Thistestmethodisnotintendedasamethodologyformonitoringon-goingparticleperformanceonceaparticularvalvehasbeentested.1.2Thistestmethodutilizesacondensationnucleuscounter(CNC)appliedtoin-linegasvalvestypicallyusedinsemiconductorapplications.Itappliestoautomaticandmanualvalvesofvarioustypes(suchasdiaphragmsorbellows),6.3through12.7-mm(1/4through1/2-in.)size.Forapplicationsofthistestmethodtolargervalves,seethetableintheappendix.1.2.1Valveslargerthan12.7mm(1/2in.)canbetestedbythismethodology.Theteststandmustbesizedaccordingly.Componentslargerthan12.7mm(1/2in.)shouldbetestedwhilemaintainingaReynoldsnumberof20000to21000.ThisistheReynoldsnumberfor12.7-mm(1/2-in.)componentstestedatavelocityof30.5m/s(100ft/s).1.3Limitations:1.3.1Thistestmethodisapplicabletototalparticlecountgreaterthantheminimumdetectionlimit(MDL)ofthecondensationnucleusparticlecounteranddoesnotconsiderclassifyingdataintovarioussizeranges.1.3.1.1Itisquestionablewhethersignificantdatacanbegeneratedfromnondynamiccomponents(suchasfittingsandshortlengthsoftubing)tocompare,withstatisticalsignificance,tothedatageneratedfromthespoolpiece.Forthisreason,thistestmethodcannotreliablysupportcomparisonsbetweenthesetypesofcomponents.1.3.1.2Ifdetectionorclassificationofparticles,orboth,inthesizerangeoflaserparticlecounter(LPC)technologyisofinterest,anLPCcanbeutilizedfortestingcomponents.Flowrates,testtimes,samplingapparatus,anddataanalysisoutlinedinthistestmethoddonotapplyforusewithanLPC.Becauseofthesevariations,datafromCNCsarenotcomparabletodatafromLPCs.1.3.2Thistestmethodspecifiesflowandmechanicalstressconditionsinexcessofthoseconsideredtypical.Theseconditionsshouldnotexceedthoserecommendedbythemanufacturer.Actualperformanceundernormaloperatingconditionsmayvary.......
【中国标准分类号】:J16
【国际标准分类号】:23_060_20;23_060_10
【页数】:27P.;A4
【正文语种】:
【原文标准名称】:测定从气体分配系统阀门产生的粒子成分的标准试验方法
【标准号】:ASTMF1394-1992(2005)
【标准状态】:现行
【国别】:
【发布日期】:1992
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.10
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:试验;阀门;分配系统;气体分配
【英文主题词】:Condensationnucleuscounter(CNC);Electricalconductors-semiconductors;Flowandflowrate-semiconductorapplications;Gasdistributionsystems;Laserparticlecounter(LPC);Lasersandlaserapplications;Mechanicalstress;Minimumdetectionlim
【摘要】:Thepurposeofthistestmethodistodefineaprocedurefortestingcomponentsintendedforinstallationintoahigh-puritygasdistributionsystem.Applicationofthistestmethodisexpectedtoyieldcomparabledataamongcomponentstestedforthepurposesofqualificationforthisinstallation.BackgroundTesting8212;Thistestmethodusesbackgroundtestingtoensurethatthesystemisnotcontributingparticlesabovealow,acceptablelevel.Thisensuresthatcountsseenarefromthetestdevice,notfromacontaminatedsystem.Thetechniquesusedtoobtainbackgroundcountsdonotproduceconditionsidenticaltotheconditionsexistingwhenatestdeviceisinplace.Itisrecommendedthatthecontrolproductsberunperiodicallytoseethattheygiveconsistentresults.Thesecontrolproductsshouldbethelowestparticlereleaseproducts.Theywillbeadditionalproofthatthesystemisnotcontributingexcessparticlesduringthestatic,dynamic,orimpactportionsofthetest.Thistestmethodcanbeusedfortestinglengthsoftubing.Theflowcriteriawillbeidenticaltothatindicatedforvalves.Atubingtestwouldonlyincludethestaticbackground,theimpactbackground,andthestaticandimpactportionsofthemethod.Adynamicportioncouldbeaddedbyactuatingtheupstreampneumaticvalve(PV1),thuscreatingaflowsurgetothetestlengthoftubing.1.1Thistestmethodcoversgasdistributionsystemcomponentsintendedforinstallationintoahigh-puritygasdistributionsystem.1.1.2Thistestmethoddescribesaproceduredesignedtodrawstatisticallysignificantcomparisonsofparticulategenerationperformanceofvalvestestedunderaggressiveconditions.1.1.3Thistestmethodisnotintendedasamethodologyformonitoringon-goingparticleperformanceonceaparticularvalvehasbeentested.1.2Thistestmethodutilizesacondensationnucleuscounter(CNC)appliedtoin-linegasvalvestypicallyusedinsemiconductorapplications.Itappliestoautomaticandmanualvalvesofvarioustypes(suchasdiaphragmsorbellows),6.3through12.7-mm(1/4through1/2-in.)size.Forapplicationsofthistestmethodtolargervalves,seethetableintheappendix.1.2.1Valveslargerthan12.7mm(1/2in.)canbetestedbythismethodology.Theteststandmustbesizedaccordingly.Componentslargerthan12.7mm(1/2in.)shouldbetestedwhilemaintainingaReynoldsnumberof20000to21000.ThisistheReynoldsnumberfor12.7-mm(1/2-in.)componentstestedatavelocityof30.5m/s(100ft/s).1.3Limitations:1.3.1Thistestmethodisapplicabletototalparticlecountgreaterthantheminimumdetectionlimit(MDL)ofthecondensationnucleusparticlecounteranddoesnotconsiderclassifyingdataintovarioussizeranges.1.3.1.1Itisquestionablewhethersignificantdatacanbegeneratedfromnondynamiccomponents(suchasfittingsandshortlengthsoftubing)tocompare,withstatisticalsignificance,tothedatageneratedfromthespoolpiece.Forthisreason,thistestmethodcannotreliablysupportcomparisonsbetweenthesetypesofcomponents.1.3.1.2Ifdetectionorclassificationofparticles,orboth,inthesizerangeoflaserparticlecounter(LPC)technologyisofinterest,anLPCcanbeutilizedfortestingcomponents.Flowrates,testtimes,samplingapparatus,anddataanalysisoutlinedinthistestmethoddonotapplyforusewithanLPC.Becauseofthesevariations,datafromCNCsarenotcomparabletodatafromLPCs.1.3.2Thistestmethodspecifiesflowandmechanicalstressconditionsinexcessofthoseconsideredtypical.Theseconditionsshouldnotexceedthoserecommendedbythemanufacturer.Actualperformanceundernormaloperatingconditionsmayvary.......
【中国标准分类号】:J16
【国际标准分类号】:23_060_20;23_060_10
【页数】:27P.;A4
【正文语种】:
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